Photoacoustic optical semiconductor characterization based on machine learning and reverse-back procedure

Abstract

This paper introduces the possibility of the determination of optical absorption and reflexivity coefficient of silicon samples using neural networks and reverse-back procedure based on the photoacoustics response in the frequency domain. Differences between neural network predictions and parameters obtained with standard photoacoustic signal correction procedures are used to adjust our experimental set-up due to the instability of the optical excitation source and the state (contamination) of the illuminated surface. It has been shown that the changes of the optical absorption values correspond to the light source wavelength fluctuations, while changes in the reflexivity coefficient, obtained in this way, correspond to the small effect of the ultrathin layer formation of SiO2 due to the natural process of surface oxidation.